Scott L. Brown

Tegal Corp. designs, manufactures, markets and services plasma etch systems used in the production of micro-electrical mechanical systems devices such as sensors, accelerometers and power devices. It provides process and equipment solutions to edge suppliers of advanced semiconductor and nanotechnology devices. Tegal was founded in December 1989 and is headquartered in Petaluma, CA.

Trikon Technologies, Inc. has developed and manufactured semiconductor fabrication Plasma Etch, PVD and CVD equipment for the global semiconductor market. Trikon Technologies was headquartered in Newprt, UK.